POLY(ARYLSULFONE IMIDE) AS E-BEAM RESIST - SYNTHESIS AND RADIOLYSIS

被引：6

作者：

CHIEN, JCW

CHENG, ZS

机构：

来源：

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY | 1989年 / 27卷 / 03期

关键词：

D O I：

10.1002/pola.1989.080270316

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：915 / 928

页数：14

共 21 条

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