NB AND NB-BASED A15 COMPOUND TUNNEL-JUNCTIONS FABRICATED USING A NEW CF4 CLEANING PROCESS

被引:9
作者
MICHIKAMI, O
TANABE, K
KATO, Y
TAKENAKA, H
机构
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D O I
10.1109/TMAG.1985.1063766
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:528 / 531
页数:4
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