NB-OXIDE-PB JOSEPHSON TUNNEL-JUNCTIONS FABRICATED USING CF4 CLEANING PROCESS .2.

被引:9
作者
KATO, Y
MICHIKAMI, O
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1984年 / 23卷 / 05期
关键词
D O I
10.1143/JJAP.23.564
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:564 / 569
页数:6
相关论文
共 19 条
[1]   CAPACITANCE AND ELLIPSOMETRICALLY DETERMINED OXIDE THICKNESS OF NB-OXIDE-PB JOSEPHSON TUNNEL-JUNCTIONS [J].
BASAVAIAH, S ;
GREINER, JH .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) :4201-4202
[2]   FABRICATION AND PROPERTIES OF NIOBIUM JOSEPHSON TUNNEL-JUNCTIONS [J].
BROOM, RF ;
LAIBOWITZ, RB ;
MOHR, TO ;
WALTER, W .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (02) :212-222
[3]   NIOBIUM OXIDE BARRIER TUNNEL JUNCTION [J].
BROOM, RF ;
RAIDER, SI ;
OOSENBRUG, A ;
DRAKE, RE ;
WALTER, W .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (10) :1998-2008
[4]   JOSEPHSON-JUNCTIONS OF SMALL AREA FORMED ON THE EDGES OF NIOBIUM FILMS [J].
BROOM, RF ;
OOSENBRUG, A ;
WALTER, W .
APPLIED PHYSICS LETTERS, 1980, 37 (02) :237-239
[5]   ELECTRICAL CHARACTERIZATION OF NB NB OXIDE PBAUIN JOSEPHSON TUNNEL-JUNCTIONS [J].
GALLAGHER, WJ ;
RAIDER, SI ;
DRAKE, RE .
IEEE TRANSACTIONS ON MAGNETICS, 1983, 19 (03) :807-810
[6]   THEORY OF JOSEPHSON TUNNELING INTO PROXIMITY-EFFECT SANDWICHES [J].
GALLAGHER, WJ .
PHYSICA B & C, 1981, 108 (1-3) :825-826
[7]   JOSEPHSON TUNNELING BARRIERS BY RF SPUTTER ETCHING IN AN OXYGEN PLASMA [J].
GREINER, HJ .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (12) :5151-&
[8]   PENETRATION DEPTH MEASUREMENTS ON TYPE-2 SUPERCONDUCTING FILMS [J].
HENKELS, WH ;
KIRCHER, CJ .
IEEE TRANSACTIONS ON MAGNETICS, 1977, 13 (01) :63-66
[9]   FABRICATION OF NB-NBOX-PB JOSEPHSON TUNNEL-JUNCTIONS USING RF GLOW-DISCHARGE OXIDATION [J].
KARULKAR, PC ;
NORDMAN, JE .
JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) :7051-7059
[10]   FABRICATION OF A15 NB3AL JOSEPHSON TUNNEL JUNCTION USING CF4 CLEANING PROCESS [J].
KATOH, Y ;
TANABE, K ;
MICHIKAMI, O .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (07) :L464-L466