NEW DIAMOND-LIKE CARBON-FILM DEPOSITION PROCESS USING PLASMA ASSISTED CHEMICAL VAPOR TRANSPORT

被引：16

作者：

ZAROWIN, CB

VENKATARAMANAN, N

POOLE, RR

机构：

来源：

APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 12期

关键词：

D O I：

10.1063/1.96712

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：759 / 761

页数：3

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