NITROGEN PLASMA SOURCE ION-IMPLANTATION OF AISI S1 TOOL STEEL

被引:10
作者
REDSTEN, AM
SRIDHARAN, K
WORZALA, FJ
CONRAD, JR
机构
[1] Plasma Source Ion Implantation Program, University of Wisconsin-Madison, Madison, WI 53706, 835 Engineering Research Building
基金
美国国家科学基金会;
关键词
D O I
10.1016/0924-0136(92)90218-H
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Significant economic savings can be achieved by improving the wear lifetime of precision manufacturing tools through nitrogen-ion implantation. This near-ambient temperature, surface modification process preserves dimensional integrity and surface finish while eliminating delamination problems that are often associated with overlay coatings. Conventional ion implantation is a line-of-sight process which requires elaborate manipulation and masking to uniformly implant components of complex shapes. A recently developed process, plasma source ion implantation (PSII). circumvents this line-of-sight restriction and makes ion implantation more attractive economically. In this article. the effects of PSII of nitrogen at a target bias of 50 kV, to a dose of 0.3 X 10(18) atoms/cm2 on the surface microstructure and mechanical properties of AISI S1 tool steel are presented.
引用
收藏
页码:253 / 261
页数:9
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