EXPERIMENTAL AND THERMODYNAMICAL INVESTIGATION OF SELECTIVE LOW-PRESSURE CHEMICAL VAPOR-DEPOSITION OF TUNGSTEN USING WCL6 AS TUNGSTEN SOURCE

被引：13

作者：

HARSTA, A

CARLSSON, JO

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(89)90099-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：263 / 276

页数：14

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CARLSSON, JO ;

BOMAN, M .

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