共 11 条
- [2] NANOMETER LITHOGRAPHY FOR III-V SEMICONDUCTOR WIRES USING CHLOROMETHYLATED POLY-ALPHA-METHYLSTYRENE RESIST [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 2308 - 2311
- [4] MAYER G, UNPUB
- [6] SZE SM, 1969, PHYSICS SEMICONDUCTO, P71
- [7] QUANTUM TRANSPORT IN AN ELECTRON-WAVE GUIDE [J]. PHYSICAL REVIEW LETTERS, 1987, 59 (06) : 732 - 735