DEGRADATION STUDIES OF PROTON-IMPLANTED VERTICAL-CAVITY SURFACE-EMITTING LASERS

被引:8
作者
CHENG, YM [1 ]
HERRICK, RW [1 ]
PETROFF, PM [1 ]
HIBBSBRENNER, MK [1 ]
MORGAN, RA [1 ]
机构
[1] HONEYWELL TECHNOL CTR,PLYMOUTH,MN 55441
关键词
D O I
10.1063/1.115044
中图分类号
O59 [应用物理学];
学科分类号
摘要
We analyze the degradation process of proton-implanted, top-emitting vertical cavity surface emitting lasers using cross-sectional cathodoluminescence. The spatially resolved luminescence characteristics of the active regions, and p- and n-distributed Bragg reflector(DBR) mirrors before and after degradation of the devices are presented. Degradation has been observed not only in the active regions, but also remarkably in the p-DBR mirror stacks. We show that a significant minority carrier population is present in the p mirror under normal operating conditions to drive the degradation observed in the p mirror. (C) 1995 American Institute of Physics.
引用
收藏
页码:1648 / 1650
页数:3
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