GRAPHICAL REPRESENTATION OF THE PIEZORESISTANCE COEFFICIENTS IN SILICON-SHEAR COEFFICIENTS IN PLANE

被引：41

作者：

KANDA, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 07期

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D O I：

10.1143/JJAP.26.1031

中图分类号：

O59 [应用物理学];

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页码：1031 / 1033

页数：3

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