ON THE SIMS DEPTH PROFILING ANALYSIS - REDUCTION OF MATRIX EFFECT

We present several techniques to reduce the matrix effect which hampers the quantification and the interpretation of SIMS analysis, particularly for the interface regions. We emphasise the MCs(+) technique (M, element to be analysed) which is one of the most useful and promising techniques. This technique is extended to MCs(2)(+) which can be used to detect the electronegative elements with high sensitivity. Moreover, the use of other alkali primary ions such as K+, instead of Cs+, is investigated. Very similar cationisation behaviour of K+ is found, making MK(+) ions have a weak matrix effect. The advantages of using MK(+), which is complementary to MCs(+), are presented. In addition, some other techniques to reduce the matrix effect are presented and compared with the MCs(+) technique.