A NEW CORRELATION METHOD FOR IMPROVEMENT IN SELECTIVITY OF BULK TRAP MEASUREMENTS FROM CAPACITANCE AND VOLTAGE TRANSIENTS

被引：30

作者：

DMOWSKI, K

机构：

[1] Institute of Microelectronics and Optoelectronics, Technical University of Warsaw, 00-662 Warsaw

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 04期

关键词：

D O I：

10.1063/1.1141180

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A new correlation method for improvement in the selectivity of bulk trap measurements from both capacitance and voltage transients is proposed. It relies on using, for deep-level transient spectroscopy, one of the new weighting functions instead of a weighting function originally proposed by Lang. The proposed method is an extension of Lang's DLTS method. Analytical expressions for correlation signals are derived. Finally, a comparative analysis of results obtained for the proposed method with those obtained for Lang's method and the method utilizing an exponential weighting function is made.

引用

收藏

页码：1319 / 1325

页数：7

相关论文

共 37 条

[1] CURRENT TRANSIENT SPECTROSCOPY - A HIGH-SENSITIVITY DLTS SYSTEM [J].

BORSUK, JA ;

SWANSON, RM .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (12) :2217-2225

[2] HIGH-RESOLUTION CAPACITANCE SPECTROSCOPY OF LPE IN0.53GA0.47AS GROWN ON FE DOPED INP-SUBSTRATE AND VPE GAAS GROWN ON CR-DOPED GAAS-SUBSTRATE [J].

BRAUCHLE, KA ;

BIMBERG, D ;

GOETZ, KH ;

JURGENSEN, H ;

SELDERS, J .

PHYSICA B & C, 1985, 129 (1-3) :426-429

[3] A MICROCOMPUTER-BASED DEEP-LEVEL TRANSIENT SPECTROSCOPY (DLTS) SYSTEM [J].

BUMGARNER, BA ;

BROWN, WD .

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1986, 35 (01) :65-70

[4] DEFECTS LEFT AFTER REGROWTH OF AMORPHOUS-SILICON ON CRYSTALLINE-SI - C(V) AND DLTS STUDIES [J].

CASTAING, J ;

CASS, T .

REVUE DE PHYSIQUE APPLIQUEE, 1985, 20 (01) :29-35

[5] TRANSIENT DISTORTION AND NTH ORDER FILTERING IN DEEP LEVEL TRANSIENT SPECTROSCOPY (DNLTS) [J].

CROWELL, CR ;

ALIPANAHI, S .

SOLID-STATE ELECTRONICS, 1981, 24 (01) :25-36

[6] SENSITIVITY ANALYSIS OF BULK TRAPS DETECTION IN ANALOG DEEP-LEVEL TRANSIENT SPECTROSCOPY MEASUREMENT SYSTEMS WITH EXPONENTIALLY WEIGHTED AVERAGE [J].

DMOWSKI, K ;

JAKUBOWSKI, A .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (01) :106-112

[7] NOISE PROPERTIES OF ANALOG CORRELATORS WITH EXPONENTIALLY WEIGHTED AVERAGE [J].

DMOWSKI, K ;

PIORO, Z .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1987, 58 (11) :2185-2191

[8] THEORETICAL SIGNAL-TO-NOISE RATIO FOR CORRELATORS WITH LINEAR AVERAGING [J].

DMOWSKI, K ;

PIORO, Z .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1987, 58 (01) :75-77

[9]

DMOWSKI K, 1989, 17TH P YUG C MICR, V1, P295

[10]

DMOWSKI K, 1989, 10TH P INT C NOIS PH

← 1 2 3 4 →