ION-BOMBARDMENT MODIFICATION OF THE SURFACE-MORPHOLOGY OF SOLIDS .1. CHANGES OF SURFACE-ROUGHNESS

One of the aspects of ion-bombardment modification of the surface morphology of solids (IBMSM) is surface roughness alteration. The influence of ion-beam sputtering on changes in the surface morphology is presented and discussed. Theoretical concepts (a simple theory), together with experimental verification including narrow- and broad-beam sputtering-induced modification of surface roughness of various materials, such as metals (aluminium, titanium), alloys (stainless steel 1H18N9T and SS316LC) and alumina ceramic (99.5% Al2O3), are the main area of interest here. These rather unexplored problems are very important from theoretical and practical points of view because there are many technologies and experimental techniques in which they are, or may be, used. © 1990 Chapman and Hall Ltd.