DYNAMIC SCANNED-PROBE LATERAL-FORCE DETERMINATION

被引：9

作者：

WETSEL, GC

ROBY, MAD

机构：

[1] Erik Jonsson School of Engineering and Computer Science, University of Texas at Dallas, Dallas

来源：

APPLIED PHYSICS LETTERS | 1995年 / 67卷 / 18期

关键词：

D O I：

10.1063/1.114427

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A continuum-mechanical model of the dynamics of a scanned probe is described that includes intrinsic losses as well as the effect of a lateral force on the end of the probe. A method for the determination of calibrated lateral force is experimentally evaluated and the sensitivity of the method is analyzed. (C) 1995 American Institute of Physics.

引用

页码：2735 / 2737

页数：3

共 12 条

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