OPTICAL CHARACTERIZATION OF SEMICONDUCTOR SURFACES AND INTERFACES

被引:163
作者
MCGILP, JF
机构
[1] Department of Physics, Trinity College, Dublin
关键词
D O I
10.1016/0079-6816(95)00034-V
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Recent developments in optical spectroscopy applied to semiconductor surfaces and interfaces are reviewed. It is shown that, by exploiting the underlying physics of the various techniques, or by exploiting special material structures, submonolayer sensitivity can be obtained using photons as both probe and signal. Examples of the use of spectroscopic ellipsometry, surface differential reflectivity, surface photoabsorption, reflection anisotropy spectroscopy, Raman spectroscopy, photoluminescence spectroscopy, second-harmonic generation and sum-frequency generation are described, with emphasis on studies of systems which have been well-characterised using conventional surface probes.
引用
收藏
页码:1 / 106
页数:106
相关论文
共 446 条
  • [71] THE OPTICAL EFFECTS OF AN ADSORBATE LAYER - D-PARAMETER DESCRIPTION OF SIMPLE-MODELS
    CHEN, W
    SCHAICH, WL
    [J]. SURFACE SCIENCE, 1989, 218 (2-3) : 580 - 602
  • [72] POLARIZATION-DEPENDENT SURFACE TRANSITIONS AT SB/GAAS(110)
    CHIARADIA, P
    SHKREBTII, AI
    GOLETTI, C
    WANG, J
    DELSOLE, R
    [J]. SOLID STATE COMMUNICATIONS, 1993, 85 (06) : 497 - 500
  • [73] CHIARADIA P, 1980, PHYS REV LETT, V99, P7011
  • [74] OPTICAL ABSORPTION OF SURFACE STATES IN ULTRAHIGH VACUUM CLEAVED (111) SURFACES OF GE AND SI
    CHIAROTTI, G
    NANNARONE, S
    PASTORE, R
    CHIARADIA, P
    [J]. PHYSICAL REVIEW B-SOLID STATE, 1971, 4 (10): : 3398 - +
  • [75] RESIDUAL SURFACE-ROUGHNESS OF DIAMOND-TURNED OPTICS
    CHURCH, EL
    ZAVADA, JM
    [J]. APPLIED OPTICS, 1975, 14 (08): : 1788 - 1795
  • [76] SIMPLE-MODEL OF ELECTRIC-DIPOLE 2ND-HARMONIC GENERATION FROM INTERFACES
    CINI, M
    [J]. PHYSICAL REVIEW B, 1991, 43 (06): : 4792 - 4802
  • [77] THEORY OF 2ND-HARMONIC GENERATION AT SEMICONDUCTOR SURFACES
    CINI, M
    DELSOLE, R
    REINING, L
    [J]. SURFACE SCIENCE, 1993, 287 : 693 - 698
  • [78] MANY-PHOTON EFFECTS IN INELASTIC LIGHT-SCATTERING
    CINI, M
    DANDREA, A
    VERDOZZI, C
    [J]. PHYSICS LETTERS A, 1993, 180 (06) : 430 - 434
  • [79] CLAUS R, 1976, SPRINGER TRACTS MODE, V78
  • [80] SURFACE QUANTUM-WELLS
    COHEN, RM
    KITAMURA, M
    FANG, ZM
    [J]. APPLIED PHYSICS LETTERS, 1987, 50 (23) : 1675 - 1677