EXPERIMENTAL SCANNING ELECTRON-BEAM AUTOMATIC REGISTRATION SYSTEM

被引：36

作者：

WILSON, AD ^{[1
]}

CHANG, THP ^{[1
]}

KERN, A ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.568506

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1240 / 1245

页数：6

共 10 条

[1] ALLES DS, 1975, 13TH P S EL ION PHOT
[2] BEASLEY JP, 1975, 13TH P S EL ION PHOT
[3] CHANG THP, 1975, 13TH P S EL ION PHOT
[4] CHANG THP, 1974, 8TH P INT C EL MICR, V1, P650
[5] CHANG THP, 1974, 6TH EL ION BEAM SCI, P580
[6] WIDE-BAND DETECTOR FOR MICRO-MICROAMPERE LOW-ENERGY ELECTRON CURRENTS
EVERHART, TE
THORNLEY, RFM
[J]. JOURNAL OF SCIENTIFIC INSTRUMENTS, 1960, 37 (07): : 246 - 248
[7] PRECISION ELECTRON-BEAM MICROFABRICATION
OZDEMIR, FS
PERKINS, WE
YIM, R
WOLF, ED
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 1008 - 1011
[8] COMPUTER-CONTROLLED ELECTRON-BEAM MICROFABRICATION MACHINE WITH A NEW REGISTRATION SYSTEM
SAITOU, N
MUNAKATA, C
MIURA, Y
HONDA, Y
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1974, 7 (06): : 441 - 444
[9] E-BEAM WRITING TECHNIQUES FOR SEMICONDUCTOR-DEVICE FABRICATION
VARNELL, GL
SPICER, DF
RODGER, AC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 1048 - 1051
[10] Wells OC, 1974, SCANNING ELECTRON MI, P20