INDIUM-DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING

被引：15

作者：

SHIH, I

QIU, CX

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 06期

关键词：

D O I：

10.1063/1.335962

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2400 / 2401

页数：2

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[1] HIGHLY CONDUCTIVE AND TRANSPARENT ALUMINUM DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
MINAMI, T
NANTO, H
TAKATA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (05): : L280 - L282
[2] ELECTRICAL AND OPTICAL-PROPERTIES OF ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING FOR TRANSPARENT ELECTRODE APPLICATIONS
NANTO, H
MINAMI, T
SHOOJI, S
TAKATA, S
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (04) : 1029 - 1034
[3] ZINC PHOSPHIDE ZINC-OXIDE HETEROJUNCTION SOLAR-CELLS
NAYAR, PS
CATALANO, A
[J]. APPLIED PHYSICS LETTERS, 1981, 39 (01) : 105 - 107
[4] TRANSPARENT AND HIGHLY CONDUCTIVE FILMS OF ZNO PREPARED BY RF REACTIVE MAGNETRON SPUTTERING
WEBB, JB
WILLIAMS, DF
BUCHANAN, M
[J]. APPLIED PHYSICS LETTERS, 1981, 39 (08) : 640 - 642