PREPARATION OF Y-BA-CU-O FILMS BY DC SPUTTERING

被引：6

作者：

SAITO, Y

SAKABE, K

ISHIHARA, K

MANAKA, K

SUGANOMATA, S

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 06期

关键词：

D O I：

10.1143/JJAP.27.1103

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1103 / 1104

页数：2

共 3 条

ASANO, H ;

TANABE, K ;

KATOH, Y ;

KUBO, S ;

MICHIKAMI, O .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (07) :L1221-L1222

[2] PREPARATION OF Y-BA-CU-O THIN-FILMS BY RF-MAGNETRON SPUTTERING [J].

OHKUMA, H ;

MOCHIKU, T ;

KANKE, Y ;

WEN, ZM ;

YOKOYAMA, S ;

ASANO, H ;

IGUCHI, I ;

YAMAKA, E .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (09) :L1484-L1486

[3] HIGH-TC SUPERCONDUCTIVITY OF RF-SPUTTERED ER-BA-CU-O FILMS [J].

TONOUCHI, M ;

YOSHIZAKO, Y ;

TAKAHASHI, T ;

SAKAGUCHI, Y ;

KITA, S ;

FUJIWARA, Y ;

KOBAYASHI, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (09) :L1462-L1464