CHARACTERIZATION OF AL2O3 FILMS DEPOSITED BY VARIOUS METHODS

被引：32

作者：

RAJOPADHYE, NR

DAKE, SB

BHORASKAR, SV

机构：

来源：

THIN SOLID FILMS | 1986年 / 142卷 / 01期

关键词：

D O I：

10.1016/0040-6090(86)90308-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：127 / 138

页数：12

共 22 条

[1] DEPENDENCE OF GAIN ON PLATE SEPARATION IN A PARALLEL PLATE CHANNEL MULTIPLIER [J].

ANDERSSON, LP ;

BERG, S ;

NILSSON, O ;

HYDER, A ;

JADRNY, R .

NUCLEAR INSTRUMENTS & METHODS, 1972, 100 (03) :539-+

[2]

BARYBIN AA, 1976, ZH PRIKL KHIM, V49, P1699

[3] PHYSICAL-PROPERTIES OF SNOX FILMS [J].

CROITORU, N ;

SEIDMAN, A ;

YASSIN, K .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (01) :102-104

[4] EFFECT OF COMPOSITION AND STRUCTURE MODIFICATION OF SNOX FILMS ON THE ELECTRON SECONDARY-EMISSION [J].

CROITORU, N ;

SEIDMAN, A ;

YASSIN, K .

THIN SOLID FILMS, 1984, 116 (04) :327-339

[5] EFFECTS OF SECONDARY-ELECTRON SCATTERING ON SECONDARY-EMISSION YIELD CURVES [J].

DIONNE, GF .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (12) :5361-5364

[6] ORIGIN OF SECONDARY-ELECTRON-EMISSION YIELD-CURVE PARAMETERS [J].

DIONNE, GF .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (08) :3347-3351

[7] INFRARED OPTICAL-PROPERTIES OF EVAPORATED ALUMINA FILMS [J].

ERIKSSON, TS ;

HJORTSBERG, A ;

NIKLASSON, GA ;

GRANQVIST, CG .

APPLIED OPTICS, 1981, 20 (15) :2742-2746

[8] MEASUREMENT OF WORK FUNCTION CHANGE IN A DISPLAY-TYPE LEED-AUGER APPARATUS [J].

FRITZ, JH ;

HAQUE, CA .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (04) :394-395

[9] FAST, ACCURATE SECONDARY-ELECTRON YIELD MEASUREMENTS AT LOW PRIMARY ENERGIES [J].

HENRICH, VE .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (04) :456-462

[10]

IZMAILOV SV, 1963, SOV PHYS-SOL STATE, V4, P1873

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