DISORDER PRODUCTION AND ANNEALING DURING HE ION RBS/CHANNELLING ANALYSIS OF INP

被引:3
作者
HE, ZT [1 ]
CARTER, G [1 ]
机构
[1] UNIV SALFORD,THIN FILM & SURFACE RES CTR,SALFORD M5 4WT,LANCS,ENGLAND
来源
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1983年 / 77卷 / 1-2期
关键词
D O I
10.1080/00337578308224726
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
引用
收藏
页码:97 / 105
页数:9
相关论文
共 21 条
[11]   PRODUCTION AND BEAM ANNEALING OF DAMAGE IN CARBON IMPLANTED SILICON .2. [J].
KOOL, WH ;
ROOSENDAAL, HE ;
WIGGERS, LW ;
SARIS, FW .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 36 (1-2) :41-48
[12]  
KOOL WH, 1976, NUCL INSTRUM METHODS, V132, P285, DOI 10.1016/0029-554X(76)90747-3
[13]   ENERGY DENSITY AND TIME CONSTANT OF HEAVY-ION INDUCED ELASTIC-COLLISION SPIKES IN SOLIDS [J].
SIGMUND, P .
APPLIED PHYSICS LETTERS, 1974, 25 (03) :169-171
[14]  
STEVANOVIC DV, 1982, UNPUB RAD EFFECTS
[15]  
SVENSSON B, 1983, UNPUB NUCL INSTRUM M
[16]   ANOMALOUS SURFACE DAMAGE IN ION BOMBARDED SILICON FROM CHANNELING-BACKSCATTERING MEASUREMENTS [J].
THOMPSON, DA ;
CARTER, G ;
HAUGEN, HK ;
STEVANOVIC, DV .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 46 (1-2) :71-77
[17]   AN ALTERNATIVE METHOD FOR THE DECHANNELLING CORRECTION IN CHANNELLING-BACKSCATTERING EXPERIMENTS [J].
TOGNETTI, NP .
RADIATION EFFECTS LETTERS, 1981, 58 (05) :151-156
[18]   SEMIEMPIRICAL METHOD OF APPLYING DECHANNELING CORRECTION IN EXTRACTION OF DISORDER DISTRIBUTION [J].
WALKER, RS ;
THOMPSON, DA ;
POEHLMAN, SW .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 34 (04) :157-161
[19]   DAMAGE PRODUCTION AT THE SURFACE OF SI SINGLE-CRYSTALS BY 200 KEV HE+ BOMBARDMENT [J].
WIGGERS, LW ;
KOEKKOEK, HG ;
BUTH, AH ;
SARIS, FW ;
ROOSENDAAL, HE .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1979, 42 (1-2) :77-81
[20]  
ZIEGLER JS, 1978, ATOMIC NUCLEAR DATA, V13, P35