EPOXY PHOTOPOLYMERS IN PHOTOIMAGING AND PHOTOFABRICATION

[11] GAYLORD NG, 1967, TECHNICAL PAPERS RET

[12] EPOXIDE-CONTAINING POLYMERS AS HIGHLY SENSITIVE ELECTRON-BEAM RESISTS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (04) : 669 - &

[13] IRIE M, 1972, J POLYM SCI POL CHEM, V10, P3233

[14] Lee H, 1967, HDB EPOXY RESINS

[15] LEVY M, 1972, Patent No. 2207853

[16] Licari J.J, 1965, US Patent, Patent No. [US3205157A, 3205157]

[17] LICARI JJ, 1970, Patent No. 1187652

[18] MAAR H, 1968, Patent No. 684268

[19] PENCZEK S, 1966, MAKROMOLEKUL CHEM, V97, P225

[20] SCHKOLNICK L, PERSONAL COMMUNICATI

[11] GAYLORD NG, 1967, TECHNICAL PAPERS RET

[12] EPOXIDE-CONTAINING POLYMERS AS HIGHLY SENSITIVE ELECTRON-BEAM RESISTS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (04) : 669 - &

[13] IRIE M, 1972, J POLYM SCI POL CHEM, V10, P3233

[14] Lee H, 1967, HDB EPOXY RESINS

[15] LEVY M, 1972, Patent No. 2207853

[16] Licari J.J, 1965, US Patent, Patent No. [US3205157A, 3205157]

[17] LICARI JJ, 1970, Patent No. 1187652

[18] MAAR H, 1968, Patent No. 684268

[19] PENCZEK S, 1966, MAKROMOLEKUL CHEM, V97, P225

[20] SCHKOLNICK L, PERSONAL COMMUNICATI