WIDE BAND MEASUREMENT OF THE REFRACTIVE-INDEX OF OPTICAL THIN-FILMS DURING THEIR DEPOSITION

被引:3
作者
ARNON, O [1 ]
CHOU, TJ [1 ]
机构
[1] INFICON LEYBOLD HERAEUS INC,SYRACUSE,NY 13057
关键词
D O I
10.1016/0040-6090(82)90120-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:23 / 31
页数:9
相关论文
共 14 条
[1]  
ABELES F, 1963, PROGR OPTICS, V2, P251
[2]   INHOMOGENEITY IN FILMS - LIMITATION OF THE ACCURACY OF OPTICAL MONITORING OF THIN-FILMS [J].
BORGOGNO, JP ;
BOUSQUET, P ;
FLORY, F ;
LAZARIDES, B ;
PELLETIER, E ;
ROCHE, P .
APPLIED OPTICS, 1981, 20 (01) :90-94
[3]  
HEITMANN W, 1967, Z ANGEW PHYSIK, V23, P221
[4]  
HIRAGA R, 1974, J APPL PHYS 7 S, V2, P689
[5]  
KNITTLE Z, 1976, OPTICS THIN FILMS, P500
[6]   OPTISCHE UNTERSUCHUNGEN ZUR WASSERDAMPFSORPTION IN AUFDAMPFSCHICHTEN (INSBESONDERE IN MGF2-SSHICHTEN) [J].
KOCH, H .
PHYSICA STATUS SOLIDI, 1965, 12 (02) :533-&
[7]   MONITORING OF OPTICAL COATINGS [J].
MACLEOD, HA .
APPLIED OPTICS, 1981, 20 (01) :82-89
[8]  
PELLETIER E, 1976, NOUV REV OPT, V6, P353
[9]   OPTICAL FILM MATERIALS AND THEIR APPLICATIONS [J].
RITTER, E .
APPLIED OPTICS, 1976, 15 (10) :2318-2327
[10]   REFRACTIVE-INDEX OF SOME OXIDE AND FLUORIDE COATING MATERIALS [J].
SMITH, D ;
BAUMEISTER, P .
APPLIED OPTICS, 1979, 18 (01) :111-115