A SCANNING PHOTON MICROSCOPE FOR NON-DESTRUCTIVE OBSERVATIONS OF CRYSTAL DEFECT AND INTERFACE TRAP DISTRIBUTIONS IN SILICON-WAFERS

被引：37

作者：

KINAMERI, K ^{[1
]}

MUNAKATA, C ^{[1
]}

MAYAMA, K ^{[1
]}

机构：

[1] HITACHI LTD, MOBARA WORKS, MOBARA, CHIBA 297, JAPAN

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1988年 / 21卷 / 01期

关键词：

D O I：

10.1088/0022-3735/21/1/017

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：91 / 97

页数：7

共 25 条

[1] COMBINED MEASUREMENTS OF FIELD EFFECT, SURFACE PHOTO-VOLTAGE AND PHOTOCONDUCTIVITY [J].

BRATTAIN, WH ;

GARRETT, CGB .

BELL SYSTEM TECHNICAL JOURNAL, 1956, 35 (05) :1019-1040

[2]

BRATTAIN WH, 1953, AT&T TECH J, V32, P1

[3] OBSERVATIONS OF INDIVIDUAL DISLOCATIONS AND OXYGEN PRECIPITATES IN SILICON WITH A SCANNING ELECTRON BEAM METHOD [J].

CZAJA, W ;

PATEL, JR .

JOURNAL OF APPLIED PHYSICS, 1965, 36 (04) :1476-&

[4] SCANNING LASER MICROSCOPE [J].

DAVIDOVITS, P ;

EGGER, MD .

NATURE, 1969, 223 (5208) :831-+

[5]

DEKOCK AJR, 1973, PHILIPS RES REP, P1

[6]

HABERER JR, 1967, PHYS FAIL ELECTRON, V5, P51

[7]

Levy M. E., 1977, 15th Annual Proceedings Reliability Physics, P44, DOI 10.1109/IRPS.1977.362771

[8] SEMICONDUCTOR PROFILING USING AN OPTICAL PROBE [J].

LILE, DL ;

DAVIS, NM .

SOLID-STATE ELECTRONICS, 1975, 18 (7-8) :699-&

[9] SCANNING ELECTRON BEAM DISPLAY OF DISLOCATION SPACE CHARGE [J].

MATARE, HF ;

LAAKSO, CW .

APPLIED PHYSICS LETTERS, 1968, 13 (06) :216-&

[10] ANALYSIS OF A AC SURFACE PHOTOVOLTAGES IN A DEPLETED OXIDIZED PARA-TYPE SILICON-WAFER [J].

MUNAKATA, C ;

NISHIMATSU, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1986, 25 (06) :807-812

← 1 2 3 →