CHEMICAL VAPOR-DEPOSITION OF ALXOYNZ FILMS

被引：16

作者：

SILVESTRI, VJ ^{[1
]}

IRENE, EA ^{[1
]}

ZIRINSKY, S ^{[1
]}

KUPTSIS, JD ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1975年 / 4卷 / 03期

关键词：

D O I：

10.1007/BF02666228

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：429 / 444

页数：16

相关论文

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[J]. JOURNAL OF ELECTRONIC MATERIALS, 1975, 4 (03) : 409 - 427
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