DETERMINATION OF THIN-FILM OPTICAL-PARAMETERS FROM PHOTOMETRIC MEASUREMENTS - AN ALGEBRAIC-SOLUTION FOR THE (T,RF,RB) METHOD

被引：17

作者：

PANAYOTOV, V

KONSTANTINOV, I

机构：

[1] Bulgarian Academy of Sciences, Central Laboratory of Photoprocesses, Sofia

来源：

APPLIED OPTICS | 1991年 / 30卷 / 19期

关键词：

THIN FILMS; OPTICAL CONSTANTS; DETERMINATION METHODS; PHOTOMETRIC MEASUREMENTS; ALGEBRAIC TECHNIQUE; ABSORBING FILMS; CONSTANTS;

D O I：

10.1364/AO.30.002795

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new method of analysis for the simultaneous determination of the optical constants and the thickness of thin films is proposed. It requires measurements under normal incidence of the transmission and of the reflections from both sides of a thin film deposited on a nonabsorbing substrate. An algebraic inversion technique is developed involving a numerical interpolation procedure in the last step. There are no missing solutions. The physical solution can be isolated by a comparison with some film thickness estimates or by measurements in a wavelength range.

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页码：2795 / 2800

页数：6

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