DOPING PROPERTIES OF RHODIUM AND IRIDIUM IN SILICIUM

被引:9
作者
LEMKE, H
机构
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1985年 / 91卷 / 01期
关键词
D O I
10.1002/pssa.2210910119
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:143 / 152
页数:10
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