QUANTITATIVE AUGER ANALYSIS BY DEPTH PROFILING OF LINE-SHAPES - APPLICATION TO NATIVE OXIDE-INSB INTERFACES

被引：31

作者：

BREGMAN, J

SHAPIRA, Y

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 04期

关键词：

D O I：

10.1116/1.583022

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：959 / 963

页数：5

共 24 条

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