LIFT-OFF PROCESS FOR ACHIEVING FINE-LINE METALLIZATION

被引：9

作者：

MILGRAM, AA ^{[1
]}

机构：

[1] FAIRCHILD ADV RES & DEV LAB,PALO ALTO,CA 94304

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.582632

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：490 / 493

页数：4

共 22 条

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[3]

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BLOCKER, TG ;

MACKSEY, HM ;

DOERBECK, FH .

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[5]

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[6]

Canavello B. J., 1977, IBM Technical Disclosure Bulletin, V19

[7]

Fredericks E. C., 1977, IBM Technical Disclosure Bulletin, V20

[8] SINGLE-STEP OPTICAL LIFT-OFF PROCESS [J].

HATZAKIS, M ;

CANAVELLO, BJ ;

SHAW, JM .

[9]

HATZAKIS M, 1977, Patent No. 4024293

[10]

HAVAS JR, 1980, Patent No. 4202914