EXPONENTIAL-GROWTH OF PERIODIC SURFACE RIPPLES GENERATED IN LASER-INDUCED ETCHING OF GAAS

被引:11
作者
KUMAGAI, H [1 ]
TOYODA, K [1 ]
MACHIDA, H [1 ]
TANAKA, S [1 ]
机构
[1] SCI UNIV TOKYO,FAC SCI,SHINJUKU KU,TOKYO 162,JAPAN
关键词
D O I
10.1063/1.105816
中图分类号
O59 [应用物理学];
学科分类号
摘要
The exponential growth of periodic surface ripples in laser-induced etching of GaAs was demonstrated for the first time. The etched depth of the ripple structure increased exponentially with increasing laser irradiation time because of the nonlinear effect of stimulated surface-plasma-wave scattering, while the etched depth of holographic grating increased linearly. A small-signal gain of 5.6%/min was obtained in the growth of the etched depth which was consistent with the theoretical value.
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页码:2974 / 2976
页数:3
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