ELECTRONIC AND OPTICAL-PROPERTIES OF P-TYPE AMORPHOUS-SILICON AND WIDE BAND-GAP AMORPHOUS-SILICON CARBIDE FILMS PREPARED BY PHOTOCHEMICAL VAPOR-DEPOSITION

被引:22
作者
INOUE, T
TANAKA, T
KONAGAI, M
TAKAHASHI, K
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D O I
10.1063/1.94962
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O59 [应用物理学];
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页码:871 / 873
页数:3
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共 12 条
[1]   The quenching of mercury resonance radiation I The saturated hydrocarbons [J].
Bates, JR .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1930, 52 :3825-3832
[2]  
CVETANOVIC RJ, 1964, PROGR REACTION KINET, V2, pCH2
[3]   REACTION OF DIBORANE WITH HG 6(P-3)1 ATOMS [J].
HIRATA, T ;
GUNNING, HE .
JOURNAL OF CHEMICAL PHYSICS, 1957, 27 (02) :477-480
[4]   PHOTOCHEMICAL VAPOR-DEPOSITION OF UNDOPED AND N-TYPE AMORPHOUS-SILICON FILMS PRODUCED FROM DISILANE [J].
INOUE, T ;
KONAGAI, M ;
TAKAHASHI, K .
APPLIED PHYSICS LETTERS, 1983, 43 (08) :774-776
[5]   WHITE PHOTO-LUMINESCENCE OF AMORPHOUS SILICON-CARBON ALLOY PREPARED BY GLOW-DISCHARGE DECOMPOSITION OF TETRAMETHYLSILANE [J].
MUNEKATA, H ;
MURASATO, S ;
KUKIMOTO, H .
APPLIED PHYSICS LETTERS, 1980, 37 (06) :536-537
[6]   MERCURY 6(3P1) PHOTOSENSITIZATION OF METHYLSILANES AND SILANE [J].
NAY, MA ;
WOODALL, GNC ;
STRAUSZ, OP ;
GUNNING, HE .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1965, 87 (02) :179-&
[7]   DEVICE PHYSICS AND DESIGN OF A-SI ITO-P-I-N HETEROFACE SOLAR-CELLS [J].
OKAMOTO, H ;
NITTA, Y ;
YAMAGUCHI, T ;
HAMAKAWA, Y .
SOLAR ENERGY MATERIALS, 1980, 2 (03) :313-325
[8]  
PETERS JW, 1980, SOLID STATE TECHNOL, V23, P121
[9]   OPTICAL AND ELECTRICAL-PROPERTIES OF AMORPHOUS-SILICON FILMS PREPARED BY PHOTOCHEMICAL VAPOR-DEPOSITION [J].
SAITOH, T ;
MURAMATSU, S ;
SHIMADA, T ;
MIGITAKA, M .
APPLIED PHYSICS LETTERS, 1983, 42 (08) :678-679
[10]  
SARKOZY RF, 1982, 1ST P INT S VLSI TEC, P68