DETERMINATION OF LOW-LEVELS OF CARBON IN CZOCHRALSKI SILICON

被引:12
作者
OATES, AS
NEWMAN, RC
WOOLLEY, R
DAVIES, G
LIGHTOWLERS, EC
BINNS, MJ
WILKES, JG
机构
[1] UNIV LONDON KINGS COLL, DEPT PHYS, LONDON WC2R 2LS, ENGLAND
[2] MULLARD SOUTHAMPTON, SOUTHAMPTON SO9 7BH, ENGLAND
关键词
D O I
10.1063/1.96065
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:705 / 707
页数:3
相关论文
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