THE FABRICATION OF 100 TO 200-NM-DIAMETER ORIFICES IN FREESTANDING 100 AND 200-NM-THICK FOILS

被引：9

作者：

BEECKEN, BP

ZIMMERMANN, W

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 04期

关键词：

D O I：

10.1116/1.573388

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1839 / 1843

页数：5

共 8 条

[1]

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[2]

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[6] FABRICATION OF APERTURES, SLOTS, AND GROOVES AT THE 8-80 NM SCALE IN SILICON AND METAL-FILMS [J].

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[7] A NEW TECHNIQUE IN THE SEARCH FOR A JOSEPHSON EFFECT IN SUPERFLUID HE-4 [J].

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[8] MODELING ION-BEAM MILLING [J].

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