BOMBARDMENT WITH ENERGETIC HYDROGEN-ATOMS DURING THE SPUTTER DEPOSITION OF AMORPHOUS HYDROGENATED SILICON

被引：10

作者：

TARDY, J

MEAUDRE, R

机构：

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1984年 / 49卷 / 01期

关键词：

D O I：

10.1080/13642818408246501

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：73 / 81

页数：9

共 21 条

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[10] OPTICAL-EMISSION SPECTROSCOPY - TOWARD THE IDENTIFICATION OF SPECIES IN THE PLASMA DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON ALLOYS [J].

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