NEW RADIO-FREQUENCY TECHNIQUE FOR DEPOSITION OF HARD CARBON-FILMS

被引：16

作者：

NYAIESH, AR

KIRBY, RE

KING, FK

GARWIN, EL

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.572961

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：610 / 613

页数：4

共 21 条

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[9] GROWTH OF CARBON-FILMS WITH RANDOM ATOMIC-STRUCTURE FROM ION IMPACT DAMAGE IN A HYDROCARBON PLASMA [J].

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