EMISSION SPECTROGRAPHIC ANALYSIS OF SURFACES WITH AN ION-SPUTTERING SOURCE

被引：56

作者：

WAITLEVERTCH, ME ^{[1
]}

HURWITZ, JK ^{[1
]}

机构：

[1] US STEEL CORP,RES LAB,MONROEVILLE,PA 15146

来源：

APPLIED SPECTROSCOPY | 1976年 / 30卷 / 05期

关键词：

D O I：

10.1366/000370276774456877

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：510 / 515

页数：6

共 9 条

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[7] GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR MICROVOLUME ELEMENTAL ANALYSIS [J].

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[8] MEASUREMENT OF BORON IMPURITY PROFILES IN SI USING GLOW-DISCHARGE OPTICAL SPECTROSCOPY [J].

GREENE, JE ;

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APPLIED PHYSICS LETTERS, 1974, 25 (08) :435-440

[9] NEW GLOW DISCHARGE LAMP FOR OPTICAL EMISSION SPECTRAL ANALYSIS [J].

GRIMM, W .

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