OPTIMUM DOPING PROFILE OF POWER MOSFET EPITAXIAL LAYER

被引:19
作者
CHEN, XB [1 ]
HU, CM [1 ]
机构
[1] CHENGDU INST RADIO ENGN,CHENGDU,PEOPLES R CHINA
关键词
D O I
10.1109/T-ED.1982.20818
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:985 / 987
页数:3
相关论文
共 7 条
[1]  
DAVID RF, 1977, P ELECTRONIC COMPONE, P324
[2]  
DUTTON RW, 1977, 50211 STANF EL LAB T
[3]  
HU C, 1979, IEEE T ELECTRON DEV, V26, P243
[4]   EPITAXIAL VVMOS POWER TRANSISTORS [J].
LANE, WA ;
SALAMA, CAT .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (02) :349-355
[5]   MODELING OF THE ON-RESISTANCE OF LDMOS, VDMOS, AND VMOS POWER TRANSISTORS [J].
SUN, SC ;
PLUMMER, JD .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (02) :356-367
[6]  
SZE SM, 1969, PHYSICS SEMICONDUCTO
[7]   A 600-VOLT MOSFET DESIGNED FOR LOW ON-RESISTANCE [J].
TEMPLE, VAK ;
LOVE, RP ;
GRAY, PV .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (02) :343-349