SURFACE MICROTOPOGRAPHY AND COMPOSITIONAL CHANGE OF CESIUM-ION-BOMBARDED SEMICONDUCTOR SURFACES

被引:14
作者
HOMMA, Y
OKAMOTO, H
ISHII, Y
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1985年 / 24卷 / 08期
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D O I
10.1143/JJAP.24.934
中图分类号
O59 [应用物理学];
学科分类号
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页码:934 / 939
页数:6
相关论文
共 17 条
[11]  
Schulz F., 1973, Radiation Effects, V18, P211, DOI 10.1080/00337577308232124
[12]  
SEKIMOTO Y, 1984, 4TH P INT C SEC ION, P38
[13]   QUANTITATIVE AUGER ANALYSIS OF COPPER-NICKEL ALLOY SURFACES AFTER ARGON ION-BOMBARDMENT [J].
SHIMIZU, H ;
ONO, M ;
NAKAYAMA, K .
SURFACE SCIENCE, 1973, 36 (02) :817-821
[14]   EVALUATION OF A CESIUM POSITIVE-ION SOURCE FOR SECONDARY ION MASS-SPECTROMETRY [J].
STORMS, HA ;
BROWN, KF ;
STEIN, JD .
ANALYTICAL CHEMISTRY, 1977, 49 (13) :2023-2030
[15]   ALLOY SPUTTERING STUDIES WITH IN-SITU AUGER ELECTRON SPECTROSCOPY [J].
TARNG, ML ;
WEHNER, GK .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (06) :2449-&
[16]   ION-BEAM-INDUCED ATOMIC MIXING AT THE SIO2-SI INTERFACE [J].
TSONG, IST ;
MONKOWSKI, JR ;
HOFFMAN, DW .
NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :237-240
[17]   SURFACE OF IRON BOMBARDED WITH ARGON AND OXYGEN IONS [J].
TSUNOYAMA, K ;
OHASHI, Y ;
SUZUKI, T ;
TSURUOKA, K .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, 13 (10) :1683-1684