REACTION AND EPITAXIAL REGROWTH AT THE NI/GAAS(001) INTERFACE - A STATE-SPECIFIC X-RAY PHOTOELECTRON DIFFRACTION INVESTIGATION

被引:9
作者
CHAMBERS, SA
LOEBS, VA
机构
[1] Boeing High Technology Center, Seattle
关键词
D O I
10.1063/1.107358
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrate, for the first time, that state-specific x-ray photoelectron diffraction can be used to determine the structural environment of reacted substrate atoms at a metal/semiconductor interface. Such measurements reveal that extensive reactivity at the Ni/GaAs(001) interface is followed by epitaxial regrowth of a CsCl phase in which Ni atoms occupy one sublattice and disrupted Ga and As atoms occupy the other sublattice.
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页码:38 / 40
页数:3
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