DIGITAL IMAGE-PROCESSING OF MULTIPLE DETECTOR SIGNALS IN SCANNING ELECTRON-MICROSCOPY

被引:14
作者
NIEMIETZ, A
REIMER, L
机构
[1] Physikalisches Institut, Universitat Munster, D 4400 Munster, Germany
关键词
IMAGE PROCESSING;
D O I
10.1016/0304-3991(85)90071-3
中图分类号
TH742 [显微镜];
学科分类号
摘要
A digital image processing system has been applied to the signals of a multiple detector system for secondary (SE) and backscattered electrons (BSE) in a SEM. The system provides the usual contrast enhancement procedures, Fourier transform and correlation and, in addition, the summation, subtraction and division of images from different detectors. The difference signal of two SE detectors can be used to reconstruct the local surface tilt and the surface profile, and a subtraction of a BSE image from a SE image allows one to extract the pure surface information. Methods for correcting image shifts of sequentially recorded micrographs have been applied by making use of a Fourier transform or a cross-correlation.
引用
收藏
页码:161 / 173
页数:13
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