SPUTTER POLISHING OF SURFACES

被引:14
作者
CARTER, G [1 ]
NOBES, MJ [1 ]
KATARDJIEV, IV [1 ]
机构
[1] UNIV UPPSALA,SCH ENGN,DEPT TECHNOL,S-75121 UPPSALA,SWEDEN
来源
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1992年 / 66卷 / 03期
关键词
D O I
10.1080/13642819208207660
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Theoretical estimates of the polishing of randomly rough surfaces by sputtering under uniform monodirectional ion bombardment are presented. The methods are based upon the Huygens wavefront construction and display the shrinkage of peaks and expansion of valleys. Peak shrinkage occurs rapidly and is less well predicted theoretically but valley expansion occurs over a longer time scale and is predictable from scaling laws developed for surface growth phenomena. The equivalent eroded depths required to reduce the roughness to specific levels are determined.
引用
收藏
页码:419 / 425
页数:7
相关论文
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