VOID FORMATION IN THIN-FILMS

被引：2

作者：

ANDREW, R ^{[1
]}

LLOYD, JR ^{[1
]}

机构：

[1] IBM CORP,E FISHKILL FACIL,HOPEWELL JUNCTION,NY 12533

来源：

关键词：

D O I：

10.1016/0040-6090(82)90180-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L25 / L26

页数：2

共 8 条

[1] GRAIN COARSENING AND GAS-BUBBLES IN AGED GOLD-FILMS [J].

ANDREW, R .

[2] GRAIN COARSENING AND GAS-BUBBLES IN ANNEALED GOLD-FILMS [J].

ANDREW, R ;

KRASEVEC, V .

[3]

ANDREW R, 1981, UNPUB

LLOYD, JR ;

NAKAHARA, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :655-659

[5] VOID GROWTH IN EARLY STAGES OF AGING AND ELECTROMIGRATION [J].

LLOYD, JR ;

NAKAHARA, S .

[6]

LLOYD JR, 1981, NOV P MRS M BOST

PAREJA, R .

[8] VOID GROWTH IN THIN SILVER FILMS [J].

SHARMA, SK ;

SPITZ, J .