PHOTOCONDUCTANCE MINORITY-CARRIER LIFETIME VS SURFACE PHOTOVOLTAGE DIFFUSION LENGTH IN SILICON

被引:17
作者
BUCZKOWSKI, A [1 ]
ROZGONYI, G [1 ]
SHIMURA, F [1 ]
MISHRA, K [1 ]
机构
[1] MEMC ELECTR MAT INC,ST PETERS,MO 63376
关键词
D O I
10.1149/1.2221017
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Recombination lifetime and diffusion length measured with the photoconductance decay and surface photovoltage techniques are compared theoretically and experimentally, and reasons for possible discrepancies are discussed. Specific examples are given which show that, if full advantage of these noncontact and nondestructive procedures is to be taken, it is necessary that surface recombination be considered in the analysis of any experimental data. This is particularly true for samples where the diffusion length is greater than one-fourth of the wafer thickness, a condition for which it is essential that theoretical algorithms for separating the bulk and surface components of recombination be developed.
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收藏
页码:3240 / 3245
页数:6
相关论文
共 16 条
[1]  
ANTTILA O, 1992, J ELECTROCHEM SOC, V139, pC309
[2]   ELECTRON AND HOLE MOBILITIES IN SILICON AS A FUNCTION OF CONCENTRATION AND TEMPERATURE [J].
ARORA, ND ;
HAUSER, JR ;
ROULSTON, DJ .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (02) :292-295
[3]  
BERTZ F, 1975, SURFACE PHYSICS PHOS, P143
[4]   BULK AND SURFACE COMPONENTS OF RECOMBINATION LIFETIME BASED ON A 2-LASER MICROWAVE REFLECTION TECHNIQUE [J].
BUCZKOWSKI, A ;
RADZIMSKI, ZJ ;
ROZGONYI, GA ;
SHIMURA, F .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (09) :6495-6499
[5]   EFFECT OF ULTRAVIOLET-IRRADIATION ON SURFACE RECOMBINATION VELOCITY IN SILICON-WAFERS [J].
BUCZKOWSKI, A ;
ROZGONYI, GA ;
SHIMURA, F .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1993, 32 (2B) :L218-L221
[6]   SEPARATION OF THE BULK AND SURFACE COMPONENTS OF RECOMBINATION LIFETIME OBTAINED WITH A SINGLE LASER MICROWAVE PHOTOCONDUCTANCE TECHNIQUE [J].
BUCZKOWSKI, A ;
RADZIMSKI, ZJ ;
ROZGONYI, GA ;
SHIMURA, F .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (07) :2873-2878
[7]  
COATES L, 1993, MAY EL CHEMS OC HON, V93, P1288
[8]   SURFACE RECOMBINATION IN SEMICONDUCTORS [J].
FITZGERALD, DJ ;
GROVE, AS .
SURFACE SCIENCE, 1968, 9 (02) :347-+
[9]  
JOHNSON E, 1957, J APPL PHYS, V23, P1349
[10]   NONDESTRUCTIVE TECHNIQUE TO MEASURE BULK LIFETIME AND SURFACE RECOMBINATION VELOCITIES AT THE 2 SURFACES BY INFRARED-ABSORPTION DUE TO PULSED OPTICAL-EXCITATION [J].
KOUSIK, GS ;
LING, ZG ;
AJMERA, PK .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (01) :141-146