DEEP-UV SPATIAL-FREQUENCY DOUBLING BY COMBINING MULTILAYER MIRRORS WITH DIFFRACTION GRATINGS

被引：7

作者：

HAWRYLUK, AM

SMITH, HI

EHRLICH, DJ

机构：

[1] MIT,DEPT ELECT ENGN & COMP SCI,ELECTR RES LAB,CAMBRIDGE,MA 02139

[2] MIT,LINCOLN LAB,LEXINGTON,MA 02173

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 04期

关键词：

D O I：

10.1116/1.582745

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1200 / 1203

页数：4

共 11 条

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[6]

HAWRYLUK AM, 1975, J APPL PHYS, V46, P2528

[7]

KERN DP, 1981, 9TH P S EL ION BEAM, P491

[8] RIGOROUS DIFFRACTION THEORY FOR TRANSMISSION PHASE GRATINGS WITH DEEP RECTANGULAR GROOVES [J].

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[9] UV-OZONE CLEANING OF SURFACES [J].

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[10]

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