THE EFFECT OF INCIDENCE ANGLE ON ION-BOMBARDMENT INDUCED SURFACE-TOPOGRAPHY DEVELOPMENT ON SINGLE-CRYSTAL COPPER

被引：11

作者：

CARTER, G ^{[1
]}

NOBES, MJ ^{[1
]}

LEWIS, GW ^{[1
]}

WHITTON, JL ^{[1
]}

机构：

[1] UNIV COPENHAGEN,HC ORSTED INST,PHYS 2 LAB,DK-2100 COPENHAGEN O,DENMARK

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1982年 / 194卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(82)90574-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：509 / 514

页数：6

共 15 条

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[2] ANALYTICAL MODELING OF SPUTTER INDUCED SURFACE MORPHOLOGY [J].

CARTER, G ;

COLLIGON, JS ;

NOBES, MJ .

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[3]

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[4]

CARTER G, 1980, P S SPUTTERING, P604

[5]

CARTER G, 1981, TOPICS APPLIED PHYSI

[6]

GRASMARTI A, 1981, UNPUB RAD EFFECTS

[7] DYNAMIC STUDY OF ION ETCHING IN A HIGH-RESOLUTION SEM [J].

LEWIS, GW ;

COLLIGON, JS ;

NOBES, MJ .

JOURNAL OF MATERIALS SCIENCE, 1980, 15 (03) :681-684

[8] LIFE-CYCLE OF COPPER CONES [J].

LEWIS, GW ;

COLLIGON, JS ;

PATON, F ;

NOBES, MJ ;

CARTER, G ;

WHITTON, JL .

RADIATION EFFECTS LETTERS, 1979, 43 (02) :49-54

[9]

LEWIS GW, 1981, UNPUB RAD EFFECTS LE

[10]

NELSON RS, 1964, ION SURFACE INTERACT, P339

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