REDUCED CARBON CONTAMINATION IN OMVPE GROWN GAAS AND ALGAAS

被引：52

作者：

KOBAYASHI, N

MAKIMOTO, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1985年 / 24卷 / 10期

关键词：

D O I：

10.1143/JJAP.24.L824

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L824 / L826

页数：3

共 6 条

[1]

KOBAYASHI N, 1984, ELECTRON LETT, V20, P887, DOI 10.1049/el:19840602

[2] SELECTIVELY-DOPED GAAS-N-ALGAAS HETEROSTRUCTURES GROWN BY MOCVD [J].

KOBAYASHI, N ;

FUKUI, T ;

TSUBAKI, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (09) :1176-1181

[3]

MORI Y, 1982, I PHYS C SER, V63, P95

SEKI, Y ;

TANNO, K ;

IIDA, K ;

ICHIKI, E .

[5] INVESTIGATION OF THERMAL DECOMPOSITION OF TRIETHYLALUMINIUM [J].

SMITH, WL ;

WARTIK, T .

JOURNAL OF INORGANIC & NUCLEAR CHEMISTRY, 1967, 29 (03) :629-&

YEDDANAPALLI, LM ;

SCHUBERT, CC .