FABRICATION OF NBN FILMS BY DC BIAS SPUTTERING AND THEIR APPLICATION TO SUPERCONDUCTING BRIDGES

被引：7

作者：

GOTO, T

ANPRUNG, P

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1983年 / 22卷 / 06期

关键词：

D O I：

10.1143/JJAP.22.955

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：955 / 959

页数：5

共 19 条

[1] RELATIONSHIP BETWEEN STRUCTURE AND SPUTTERING PARAMETERS IN NBN FILMS [J].

ALESSANDRINI, EI ;

SADAGOPAN, V ;

LAIBOWITZ, RB .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (01) :188-+

[2] CURRENT-PHASE RELATIONSHIP OF GRANULAR NBN WEAK LINKS, INFERRED FROM JOSEPHSON INTERFEROMETER CHARACTERISTICS [J].

CLAASSEN, JH .

APPLIED PHYSICS LETTERS, 1982, 40 (09) :839-841

[3] JOSEPHSON BEHAVIOR IN GRANULAR NBN WEAK LINKS [J].

CLAASSEN, JH .

APPLIED PHYSICS LETTERS, 1980, 36 (09) :771-773

[4] SUPERCONDUCTING PROPERTIES OF NIOBIUM-TITANIUM-NITRIDE THIN FILMS [J].

GAVALER, JR ;

DEIS, DW ;

HULM, JK ;

JONES, CK .

APPLIED PHYSICS LETTERS, 1969, 15 (10) :329-+

[5]

Goto T., 1976, Oyo Buturi, V45, P1003

[6] FABRICATION OF ULTRASHORT NIOBIUM VARIABLE-THICKNESS BRIDGES [J].

GOTO, T .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1982, 53 (11) :1661-1662

[7]

GOTO T, 1971, OYO BUTURI, V40, P269

[8] PROPERTIES OF SUPERCONDUCTING WEAK LINKS PREPARED BY ION-IMPLANTATION AND BY ELECTRON-BEAM LITHOGRAPHY [J].

HARRIS, EP ;

LAIBOWITZ, RB .

IEEE TRANSACTIONS ON MAGNETICS, 1977, 13 (01) :724-730

[9] SUPERCONDUCTING TRANSITION TEMPERATURES OF RF SPUTTERED NBN FILMS [J].

KESKAR, KS ;

YAMASHITA, T ;

ONODERA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1971, 10 (03) :370-+

[10] RF REACTIVELY SPUTTERED SUPERCONDUCTING NBNX FILMS [J].

KESKAR, KS ;

YAMASHITA, T ;

ONODERA, Y ;

GOTO, Y ;

ASO, T .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (07) :3102-3105

← 1 2 →