PHYSICAL AND CHEMICAL SPUTTERING OF MULTICOMPONENT SOLIDS

被引：15

作者：

ECKSTEIN, W

ROTH, J

GAUTHIER, E

机构：

[1] Max-Planck-Inst fuer Plasmaphysik, Garching/Muenchen

来源：

FUSION TECHNOLOGY | 1991年 / 19卷 / 04期

关键词：

SPUTTERING; CHEMICAL SPUTTERING; PLASMA WALL INTERACTION;

D O I：

10.13182/FST91-A29342

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

The bombardment of beryllium by carbon is investigated by a dynamic Monte Carlo simulation to demonstrate the complicated nature of this type of simple system by considering only collisional effects. Furthermore, the sputtering yield dependence on the incident angle is investigated for O-BeO, Be-Be, and C-Be systems at 3 keV. Experimental data on the influence of boron in carbon targets on the sputtering yield for bombardment by 1-keV deuterium are provided.

引用

页码：2076 / 2082

页数：7

共 13 条

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