IONIZED-CLUSTER BEAM EPITAXY OF CDTE AND ITS APPLICATION TO CDTE/PBTE MULTILAYER STRUCTURE

被引：21

作者：

TAKAGI, T ^{[1
]}

TAKAOKA, H ^{[1
]}

KURIYAMA, Y ^{[1
]}

MATSUBARA, K ^{[1
]}

机构：

[1] YAMAGUCHI UNIV,DEPT ELECTR,UBE,YAMAGUCHI 755,JAPAN

来源：

关键词：

D O I：

10.1016/0040-6090(85)90186-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：149 / 154

页数：6

共 7 条

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[2] KRONIG RDL, 1930, P ROY SOC A, V130, P499
[3] ROLE OF IONS IN ION-BASED FILM FORMATION
TAKAGI, T
[J]. THIN SOLID FILMS, 1982, 92 (1-2) : 1 - 17
[4] OPTICAL AND THERMAL-PROPERTIES OF BEO THIN-FILMS PREPARED BY REACTIVE IONIZED-CLUSTER BEAM TECHNIQUE
TAKAGI, T
MATSUBARA, K
TAKAOKA, H
[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (10) : 5419 - 5424
[5] ION-SURFACE INTERACTIONS DURING THIN-FILM DEPOSITION
TAKAGI, T
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 382 - 388
[6] TAKAGI T, 1978, I PHYS C SER, V38, P229
[7] TAKAOKA H, 1983, 1983 P INT ION ENG C, P1241