ION-SURFACE INTERACTIONS DURING THIN-FILM DEPOSITION

被引：175

作者：

TAKAGI, T

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期

关键词：

D O I：

10.1116/1.572748

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：382 / 388

页数：7

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