ION-IMPLANTATION AND INTEGRATED-OPTICS

被引:30
作者
TOWNSEND, PD [1 ]
机构
[1] UNIV SUSSEX, SCH MATH & PHYS SCI, BRIGHTON BN1 9QH, SUSSEX, ENGLAND
来源
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1977年 / 10卷 / 03期
关键词
D O I
10.1088/0022-3735/10/3/001
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:197 / 203
页数:7
相关论文
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