ION-IMPLANTATION AND INTEGRATED-OPTICS

被引：30

作者：

TOWNSEND, PD ^{[1
]}

机构：

[1] UNIV SUSSEX, SCH MATH & PHYS SCI, BRIGHTON BN1 9QH, SUSSEX, ENGLAND

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1977年 / 10卷 / 03期

关键词：

D O I：

10.1088/0022-3735/10/3/001

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：197 / 203

页数：7

共 79 条

[11]

Crowder Billy L., 1973, ION IMPLANTATION SEM

[12]

CROWDER BL, 1975, ION IMPLANTATION SEM

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DEARNALEY, G .

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[14]

DEARNALEY G., 1973, ION IMPLANTATION

[15] ION-IMPLANTATION DOPING OF COMPOUND SEMICONDUCTORS [J].

DEGEN, PL .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1973, 16 (01) :9-42

[16] GAAS AND GAALAS DEVICES FOR INTEGRATED OPTICS [J].

EVTUHOV, V ;

YARIV, A .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1975, MT23 (01) :44-57

[17]

FAVENNEC PN, 1975, ION IMPLANTATION SEM, P65

[18]

FRENCH WG, 1974, BELL SYST TECH J, V53, P951, DOI 10.1002/j.1538-7305.1974.tb02778.x

[19] OPTICAL-WAVEGUIDE TECHNOLOGY FOR MODERN URBAN COMMUNICATIONS [J].

GALLAWA, RL .

IEEE TRANSACTIONS ON COMMUNICATIONS, 1975, CO23 (01) :131-142

[20] OPTICAL WAVEGUIDING IN PROTON-IMPLANTED GAAS [J].

GARMIRE, E ;

STOLL, H ;

YARIV, A ;

HUNSPERGER, RG .

APPLIED PHYSICS LETTERS, 1972, 21 (03) :87-+

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